Design and construction of a cavity electro-opto-mechanical system

The parallel advances in the fields of electromechanics and optomechanics have raised the prospect of coupling mechanical motion to both electrical and optical fields. Such a hybrid device has many applications, including transduction of quantum information between microwave and optical frequencies. We demonstrate a cavity electro-opto-mechanical device with a mechanical resonator formed by a thin Si${}_3$N${}_4$ membrane. Partial metallization of the membrane with niobium completes a superconducting electrical circuit fabricated using a ``flip-chip'' technique. This package is integrated into a free-space high-finesse Fabry-Perot cavity, whose spatial mode interacts with the non-metallized portion of the membrane. We report on device performance and discuss future directions for design of hybrid electro-opto-mechanical devices.