Bulletin of the American Physical Society
APS March Meeting 2013
Volume 58, Number 1
Monday–Friday, March 18–22, 2013; Baltimore, Maryland
Session M23: Optical and Dielectric Properties
8:00 AM–10:48 AM,
Wednesday, March 20, 2013
Room: 325
Sponsoring
Unit:
DCMP
Chair: Qingteng Zhang, University of Wisconsin
Abstract ID: BAPS.2013.MAR.M23.4
Abstract: M23.00004 : Structural evolution of nanoporous ultra-low k dielectrics under voltage stress*
8:36 AM–8:48 AM
Preview Abstract
Abstract
Authors:
Archana Raja
(Columbia University)
Thomas Shaw
(IBM Yorktown Heights)
Alfred Grill
(IBM Yorktown Heights)
Robert Laibowitz
(Columbia University)
Tony Heinz
(Columbia University)
*Supported by the Semiconductor Research Corporation
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2013.MAR.M23.4
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