Parallel conductive-AFM lithography of LaAlO$_3$/SrTiO$_3$ using 1D multiple-tip array*

Nanoscale devices at the LaAlO$_3$/SrTiO$_3$ interface can be created by metastable charging of the top LaAlO$_3$ surface using a voltage-biased conductive-AFM tip.\footnote{C.Cen, \textit{et al.}, \textit{Nature Materials} \textbf{7}, 298 (2008).} In order to create scalable nanoelectronic circuits, it will be important to develop a process to allow multiple tips to write nanostructures in parallel. Here we demonstrate a parallel writing scheme using a 1D multiple-tip array. Independent control over the writing process for each tip is achieved by holding the tip array at a fixed potential and varying the voltage applied to individual electrodes.