Bulletin of the American Physical Society
APS March Meeting 2012
Volume 57, Number 1
Monday–Friday, February 27–March 2 2012; Boston, Massachusetts
Session X5: Structure and Formation of Oxide Surfaces and Interfaces
2:30 PM–5:30 PM,
Thursday, March 1, 2012
Room: 206A
Sponsoring
Unit:
DCMP
Chair: Michael Pierce, Rochester Institute of Technology
Abstract ID: BAPS.2012.MAR.X5.14
Abstract: X5.00014 : Synchrotron Photoemission Characterization of Process Dependent Oxidation Control in InGaAs/High-k Film Systems
5:06 PM–5:18 PM
Preview Abstract Abstract
Authors:
Conan Weiland
(National Institute of Standards and Technology)
Joseph Woicik
(National Institute of Standards and Technology)
Jimmy Price
(SEMATECH)
Pat Lysaght
(SEMATECH)
Jeff Huang
(SEMATECH)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2012.MAR.X5.14
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