MEMS Fabricated MM-Wave Slow Wave Structure*

We report on the fabrication and test of a MEMS slow wave structure designed for a $>$ 40 GHz bandwidth centered on 220 GHz operation, that slows radiation down to group velocity of 8.16 x 10$^{7}$ ms$^{-1}$ where the velocity matches the speed of electrons from a 20 keV source. The slow wave device uses a 40 mm long staggered interdigitated vane structure within a waveguide [1]. Ultimately, such a device will be integrated with an electron beam to become part of a sheet beam travelling wave tube (SBTWT) amplifier. A gold coated deep reactive ion etched (DRIE) silicon test structure was fabricated to test the RF properties of the design. This MEMS structure was coupled to WR-4 waveguide in a metal fixture and the S-parameters measured using a vector network analyzer, allowing extraction of the insertion loss and signal delay as a function of frequency. A further MEMS structure with just 10 cells of the vane structure within a cavity were fabricated which allows points on the dispersion curve to be directly measured as resonances of the structure. Extraction of the dispersion curve verifies the group velocity measurement of the device. \\[4pt] [1] Y-M. Shin {\&} L.R. Barnett, \textit{Appl.Phys. Lett. 2008,} 92 pp. 091501.