Towards 3D and Multilayer Electromagnetic Metamaterials Structures in the THz Range*

V. G. Veselago predicted that left-handed materials would exhibit a plethora of unusual effects such as a negative index of refraction as used in Snell's law, a reverse Doppler and \v {C}erenkov effect. This novel class of materials, following Pendry's recipes, can potentially restore evanescent waves to focus subwavelength details in an image. Micron-size electromagnetic metamaterials (EM$^3$) structures which exist so far were produced and characterized as single layer structures. Furthermore the structures were produced with a low yield. In the first part of the talk, we will present techniques for producing copious amount of EM$^3$ chips via the LIGA process using Synchrotron radiation and demonstrate assembly of the first multilayer THz EM$^3$ structures. The planar micro- or nanoEM$^3$ produced so far are also highly anisotropic. Recently, we proposed schemes to produce more isotropic structures, within the same matrix, via tilted X-ray exposures that were introduced in the LIGA process years ago. In the second part of the talk, we will show the results of microfabrication of nearly 3D EM$^3$ structures for the THz range.