Bulletin of the American Physical Society
77th Annual Gaseous Electronics Conference
Monday–Friday, September 30–October 4 2024; San Diego, California
Session IR2: Gas-Phase Plasma Chemistry II
10:00 AM–12:00 PM,
Thursday, October 3, 2024
Room: Great Room 5
Chair: Vincent Donnelly, University of Houston
Abstract: IR2.00001 : Tabletop microwave capillary reactor for nanodiamond synthesis*
10:00 AM–10:15 AM
Presenter:
Tanvi Nikhar
(Michigan State University)
Authors:
Tanvi Nikhar
(Michigan State University)
Taha Y Posos
(Michigan State University)
Sergey V Baryshev
(Michigan State University)
In the present work, an operating flow-through tabletop microwave chemical vapor deposition reactor is presented that can achieve nanodiamond synthesis, as evident from material characterization. The reactor consists of a quartz tube placed inside a compact cylindrical 2.45 GHz cavity. Precursor gases (H2 and CH4) flow through the tube to generate a stable plasma discharge. The input operating power is <100 W and samples are collected on a substrate placed in the tube at varying distances from the plasma core. A reactor-scale plasma model with H2/CH4 plasma chemistry is solved for the spatial distribution of CxHy (where x = 1,2 and y = 0-3) radicals. The electromagnetic absorption in the plasma and the corresponding gas heating and electron distribution functions are calculated. It is shown that the reactor is extremely efficient in producing atomic H and CH3 radicals owing to the gas temperature of 2,000 K – all key parameters in producing sp3 phase carbon.
*1. U.S. Department of Energy, Office of Science, Office of Fusion Energy Sciences, Award No. DE-SC00232112. National Science Foundation, Division of Chemical, Bioengineering, Environmental and Transport Systems, Award No. 2333452
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