On the new interpretation method of floating harmonic probe (FHP) in the presence of an electron beam*

Floating harmonic probe (FHP) is a method for measuring electron temperature by applying a sinusoidal voltage to a probe at floating potential (Vf) and using the distorted current due to the sheath nonlinearity. When an electron beam is present in plasmas, it alters the I-V Curve, which can affect the electron temperature of the background plasma measurement using the FHP. In a plasma where an electron beam is present, the electron temperature of the background plasma is measured by modifying the FHP. When the beam energy is low, it distorts the I-V Curve near a floating potential. The electron temperature is obtained through the probe current equation considering the electron beam current. When the beam energy is high, it does not affect the I-V Curve near floating potential. In plasma where an electron beam exists, the beam current has a very large effect on measuring the electron temperature, and it is very important to measure the electron temperature by taking this into consideration.