Numerical simulation of discharge characteristics of sensitively coupled plasma in a Faraday cage*

Plasma stealth technology has attracted much attention because of its advantages such as wide frequency band and good absorbing effect. Taking Inductively Coupled Plasma (ICP) as the research object, this paper proposed a method to improve the electron density of plasma by using the electromagnetic shielding effect of Faraday cage. Faraday cage can effectively prevent magnetic field dispersion, enhance magnetic field strength, and improve the induced electric field. The energy of the particles in the chamber is enhanced, which increases the electron density of the plasma. At the same time, the electromagnetic shielding effect of the Faraday cage can effectively prevent the electromagnetic interference of the magnetic field on the external equipment such as the flowmeter, making the experimental effect more accurate. Based on COMSOL, a two-dimensional inductively coupled plasma discharge model was established, and the effects of Faraday cage on ICP discharge parameters were studied. The results show that the Faraday cage can effectively increase the electron density of plasma, and the plasma distribution is uniform. With the increase of discharge power, the effect on plasma electron density becomes more and more obvious. The results provide a theoretical basis for the subsequent research of plasma stealth technology.