Bulletin of the American Physical Society
77th Annual Gaseous Electronics Conference
Monday–Friday, September 30–October 4 2024; San Diego, California
Session FF1: Modeling & Simulation VIII
8:00 AM–9:15 AM,
Friday, October 4, 2024
Room: Great Room 1-4
Chair: Hari Sitaraman, National Renewable Energy Laboratory
Abstract: FF1.00001 : Chips Making Chips: The Role of Plasma Modeling, Virtualization and Machine Learning in Advanced Semiconductor Development
8:00 AM–8:30 AM
Presenter:
David Michael Fried
(Lam Research)
Author:
David Michael Fried
(Lam Research)
In this talk, we will discuss how semiconductor production is being aided by “virtual twins” and review the challenges and opportunities available. We will examine the use of virtual twins in the semiconductor industry and the role and use cases of plasma modeling in virtual fabs. In addition, we will discuss how process modeling and virtual chambers are being used together in semiconductor design and manufacturing. Finally, we will review a case study that demonstrates how human intelligence and experience can be complemented by machine learning to further accelerate the spiral of innovation in computer chip technology.
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