Bulletin of the American Physical Society
77th Annual Gaseous Electronics Conference
Monday–Friday, September 30–October 4 2024; San Diego, California
Session ET1: Plasma Diagnostics I
8:00 AM–9:30 AM,
Tuesday, October 1, 2024
Room: Shutters West I and II
Chair: Claudia Lazzaroni, LSPM CNRS
Abstract: ET1.00001 : Comprehensive spatial mapping of plasma parameters in low-pressure nitrogen plasma by optical emission spectroscopy*
8:00 AM–8:15 AM
Presenter:
Jonggu Han
(Jeonbuk national university)
Authors:
Jonggu Han
(Jeonbuk national university)
Se Youn Moon
(Jeonbuk National Univsersity, Republic of Korea)
Collaborations:
Jonggu Han, Se Youn Moon
Although the valuable information of plasma is provided by OES, it has limitations in spatial analysis as it only measures local information at a single point. To obtain spatially-resolved information in plasma, methods such as laser-induced fluorescence and tomography have been suggested [3]. However, these methods are often impractical for industrial applications due to their invasive nature, lengthy measurement times, and complex experimental setups.
In this study, therefore, we investigate a technique to analyze the spatial characteristics of plasma based on emission images captured using a charge-coupled device (CCD). The spectrum of each pixel in 2-dimensional images of plasma was reconstructed using a novel filtering method and numerical simulation of spectra. Moreover, crucial plasma parameters, such as electron temperature and density, were mapped by applying simple kinetic modeling to the reconstructed spectrum.
*This work was supported by SAMSUNG Electronics (IO230704-06622-01) and supported by a Korea Basic Institute (National Research Facilities and Equipment Center) grant funded by the Ministry of Education (no. 2021R1A6C101B383).
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