Monday, September 30, 2024
9:30AM - 10:00AM
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EM2.00001: Physics-informed neural networks for calculation and measurement of fundamental data on electron transport in plasmas
Invited Speaker:
Satoru Kawaguchi
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Monday, September 30, 2024
10:00AM - 10:30AM
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EM2.00002: Data-Enabled Control of Low-Temperature Plasma Interactions with Complex Interfaces
Invited Speaker:
Ali Mesbah
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Monday, September 30, 2024
10:30AM - 11:00AM
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EM2.00003: Coffee Break
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Monday, September 30, 2024
11:00AM - 11:30AM
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EM2.00004: Neural Network Model of Radio-Frequency Plasmas
Invited Speaker:
Kallol Bera
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Monday, September 30, 2024
11:30AM - 12:00PM
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EM2.00005: Human-Machine Collaboration in Semiconductor Process Development
Invited Speaker:
Richard Alan Gottscho
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Monday, September 30, 2024
12:00PM - 1:00PM
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EM2.00006: Lunch
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Monday, September 30, 2024
1:00PM - 1:30PM
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EM2.00007: Recent developments in the provision of atomic and molecular data for plasma modelling
Invited Speaker:
Jonathan Tennyson
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Monday, September 30, 2024
1:30PM - 2:00PM
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EM2.00008: Physics-informed low-temperature plasma simulation: frameworks and applications
Invited Speaker:
Linlin Zhong
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Monday, September 30, 2024
2:00PM - 2:30PM
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EM2.00009: Data-driven plasma science-based plasma etching process design in OLED and Semiconductor mass productions referring to PI-VM
Invited Speaker:
Seolhye Park
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Monday, September 30, 2024
2:30PM - 3:00PM
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EM2.00010: Plasma process optimization using machine learning
Invited Speaker:
Tsuyoshi Moriya
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Monday, September 30, 2024
3:00PM - 3:30PM
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EM2.00011: Coffee Break
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Monday, September 30, 2024
3:30PM - 4:00PM
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EM2.00012: Demonstrating Data-Driven Capabilities for use in Plasma Physics
Invited Speaker:
Christine Greve
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Monday, September 30, 2024
4:00PM - 4:30PM
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EM2.00013: A Study for Solving the Boltzmann Equation with Variable E/N using Physics-informed Neural Networks
Invited Speaker:
Kim Jinseok
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Monday, September 30, 2024
4:30PM - 5:00PM
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EM2.00014: An Introduction to Version 3 of the LXCat Plasma Input Data Platform
Invited Speaker:
Jan Van Dijk
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Monday, September 30, 2024
5:00PM - 5:30PM
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EM2.00015: Open Discussion
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