Validating and improving models for the ion collection by cylindrical probes*

Langmuir probes remain one of the most important diagnostic tools for plasma processing applications. Modern probe analysis usually relies on the electron current part of the Langmuir probe characteristic using the Druyvesteyn method. However, for electronegative plasmas or for discharges containing dust the analysis of the ion current attracted by the probe can be desirable to determine the ion density. But, even at low pressures of a few Pa, the ion current is affected by collisions due to the large cross section for charge exchange. Available theories for collisional or collision-enhanced ion currents onto probes are complex and not well validated.

Thus, in this contribution, we compare available collisional probe theories for the ion current to results of particle-in-cell (PIC) simulations. To this end, the probe surrounded by a semi-infinite plasma is simulated using a modified version of the open-source code EDIPIC. A dataset of currents for different neutral gas pressures is obtained and compared to the different theories from the literature. Based on these results, we propose a simpler and more intuitive model for the ion current collected by the probe, based on the model of Gatti and Kortshagen (Phys. Rev. E 78, 046402, 2008), developed for the charging of dust particles.