Bulletin of the American Physical Society
76th Annual Gaseous Electronics Conference
Volume 68, Number 9
Monday–Friday, October 9–13, 2023; Michigan League, Ann Arbor, Michigan
Session IW5: Poster Session II; Exhibition & Coffee (4:00pm-6:00pm)
4:00 PM,
Wednesday, October 11, 2023
Room: Michigan League, Ballroom
Abstract: IW5.00041 : Modulating Capacitively Coupled Plasma Characteristics using F- Ion Beam Injection*
Presenter:
Zhou Youyou
(Wuhan University of Technology)
Authors:
Zhou Youyou
(Wuhan University of Technology)
Wu Hao
(Huazhong University of Science and Technology)
Wang Yu
(Huazhong University of Science and Technology)
Xu Jingwen
(Wuhan University of Technology)
Zhang Ya
(Wuhan University of Technology)
Jiang Wei
(Huazhong University of Science and Technology)
Collaborations:
Youyou Zhou, Hao Wu, Ya Zhang, Wei Jiang
*This work was supported by the National Natural Science Foundation of China ( 11975174, 12275095,11775090 and 12011530142).
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