Bulletin of the American Physical Society
76th Annual Gaseous Electronics Conference
Volume 68, Number 9
Monday–Friday, October 9–13, 2023; Michigan League, Ann Arbor, Michigan
Session IW5: Poster Session II; Exhibition & Coffee (4:00pm-6:00pm)
4:00 PM,
Wednesday, October 11, 2023
Room: Michigan League, Ballroom
Abstract: IW5.00039 : Numerical Simulation of an RF Capacitive Discharge in CO2 Using the Hydrodynamic Code SIGLO-rf*
Presenter:
Valeriy Lisovskiy
(V.N. Karazin Kharkiv National University, Kharkiv, Ukraine)
Authors:
Valeriy Lisovskiy
(V.N. Karazin Kharkiv National University, Kharkiv, Ukraine)
Stanislav Dudin
(V.N. Karazin Kharkiv National University, Kharkiv, Ukraine)
Amaliia Shakhnazarian
(V.N. Karazin Kharkiv National University, Kharkiv, Ukraine)
Pavlo Platonov
(V.N. Karazin Kharkiv National University, Kharkiv, Ukraine)
V D Yegorenkov
(V.N. Karazin Kharkiv National University, Kharkiv, Ukraine)
*This work was supported by the National Research Foundation of Ukraine in the framework of the project 2021.01/0204.
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