Bulletin of the American Physical Society
76th Annual Gaseous Electronics Conference
Volume 68, Number 9
Monday–Friday, October 9–13, 2023; Michigan League, Ann Arbor, Michigan
Session IW5: Poster Session II; Exhibition & Coffee (4:00pm-6:00pm)
4:00 PM,
Wednesday, October 11, 2023
Room: Michigan League, Ballroom
Abstract: IW5.00037 : Characterization of Microwave Plasma Using Langmuir Probe and Imaging Techniques*
Presenter:
Nafisa Tabassum
(North Carolina State University)
Authors:
Nafisa Tabassum
(North Carolina State University)
Corey DeChant
(North Carolina State University)
Abdullah Zafar
(Applied Materials)
David J Peterson
(Applied Materials Inc)
Kristopher Ford
(Applied Materials)
Brian Alvarez
(Applied Materials)
Philip A Kraus
(Applied Materials Inc)
Steven Shannon
(North Carolina State University)
*A generous donation from Applied Materials Inc.
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