Bulletin of the American Physical Society
76th Annual Gaseous Electronics Conference
Volume 68, Number 9
Monday–Friday, October 9–13, 2023; Michigan League, Ann Arbor, Michigan
Session IW5: Poster Session II; Exhibition & Coffee (4:00pm-6:00pm)
4:00 PM,
Wednesday, October 11, 2023
Room: Michigan League, Ballroom
Abstract: IW5.00027 : Four impedance matching methods for capacitatively coupled plasma source with transmission line and lumped parameter circuit.*
Presenter:
Shimin Yu
(Huazhong University of Science and Technology)
Authors:
Shimin Yu
(Huazhong University of Science and Technology)
Yu Wang
(Huazhong University of Science and Technology)
Zili Chen
(Huazhong University of Science and Technology)
Dehen Cao
(Huazhong University of Science and Technology)
Jingwen Xu
(Wuhan University of Technology)
Lu Wang
(Huazhong University of Science and Technology)
Zhijiang Wang
(Huazhong University of Science and Technology)
Wei Jiang
(Huazhong University of Science and Technology)
Ya Zhang
(Wuhan University of Technology)
*This work was supported by the National Magnetic Confinement Fusion Energy Research Project (2017YFE0301805), the National Natural Science Foundation of China (12275095, 11975174, 11775090 and 12011530142)
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