Bulletin of the American Physical Society
76th Annual Gaseous Electronics Conference
Volume 68, Number 9
Monday–Friday, October 9–13, 2023; Michigan League, Ann Arbor, Michigan
Session IT4: Poster Session I; Exhibition & Coffee (4:00pm-6:00pm)
4:00 PM,
Tuesday, October 10, 2023
Room: Michigan League, Ballroom
Abstract: IT4.00039 : Effects of substrate cooling on the ion density in oxygen inductive discharge
Presenter:
JONGHA AHN
(Department of Electrical Engineering, Hanyang University)
Authors:
JONGHA AHN
(Department of Electrical Engineering, Hanyang University)
Minseok Kim
(Department of Electrical Engineering, Hanyang University)
DEOKHWAN KIM
(Department of Electrical Engineering, Hanyang University)
CHINWOOK CHUNG
(Department of Electrical Engineering, Hanyang University)
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