​​​​​​Ion temperature calculation using a global model for low-temperature plasma sources*

We developed a global method to calculate the ion temperature in a self-consistent manner. To validate the proposed model, the obtained results were compared with experimental and 2D simulation results. We investigated radio-frequency inductively coupled Ar, N2, and Cl2 discharges in the pressure range of 5–20 mTorr and power range of 200–1000 W. The results revealed that the spatially averaged ion temperature was consistent with the experimental and 2D simulation results. Moreover, the ion temperature affected the bulk plasma parameters and the IAD. Although many points need to be considered for improving the accuracy of the global model for low temperature plasma sources, the proposed model is expected to contribute to the improvement of the previous global models.