Bulletin of the American Physical Society
76th Annual Gaseous Electronics Conference
Volume 68, Number 9
Monday–Friday, October 9–13, 2023; Michigan League, Ann Arbor, Michigan
Session HW4: Magnetically-Enhanced Plasmas: Magnetron
1:30 PM–3:15 PM,
Wednesday, October 11, 2023
Room: Michigan League, Michigan
Chair: Sathya Ganta, Applied Materials Inc
Abstract: HW4.00006 : Gradient drift instabilities and rotating spokes in direct current and radio frequency driven magnetron discharges
2:45 PM–3:15 PM
Presenter:
Liang Xu
(Soochow University, China)
Authors:
Liang Xu
(Soochow University, China)
Denis Eremin
(Ruhr Univ Bochum)
Andrei Smolyakov
(Univ Saskatchewan)
Haoming Sun
(École Polytechnique fédérale de Lausanne (EPFL), Swiss Plasma Center (SPC), Switzerland)
Dennis Krüger
(Ruhr Univ Bochum)
Kevin Köhn
(Ruhr Univ Bochum)
Ralf Peter Brinkmann
(Ruhr Univ Bochum)
Sathya S Ganta
(Applied Materials, Inc.)
Igor D Kaganovich
(Princeton Plasma Physics Laboratory)
Kallol Bera
(Applied Materials, Inc.)
Shahid Rauf
(Applied Materials, Inc.)
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