Bulletin of the American Physical Society
76th Annual Gaseous Electronics Conference
Volume 68, Number 9
Monday–Friday, October 9–13, 2023; Michigan League, Ann Arbor, Michigan
Session HW4: Magnetically-Enhanced Plasmas: Magnetron
1:30 PM–3:15 PM,
Wednesday, October 11, 2023
Room: Michigan League, Michigan
Chair: Sathya Ganta, Applied Materials Inc
Abstract: HW4.00002 : Thermodynamic quasi-equilibria in high power magnetron discharges: A generalized Poisson-Boltzmann relation*
1:45 PM–2:00 PM
Presenter:
Ralf Peter Brinkmann
(Ruhr Univ Bochum)
Authors:
Ralf Peter Brinkmann
(Ruhr Univ Bochum)
Kevin Köhn
(Ruhr Univ Bochum)
Dennis Krüger
(Ruhr Univ Bochum)
Liang Xu
(Soochow University)
Denis Eremin
(Ruhr Univ Bochum)
*Funding by DFG via SFB TR 87 is gratefully acknowledged.
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