Bulletin of the American Physical Society
76th Annual Gaseous Electronics Conference
Volume 68, Number 9
Monday–Friday, October 9–13, 2023; Michigan League, Ann Arbor, Michigan
Session GR1: Magnetized and Thermal Plasmas
8:00 AM–9:00 AM,
Thursday, October 12, 2023
Room: Michigan League, Henderson
Chair: Denis Eremin, Ruhr University Bochum
Abstract: GR1.00002 : Experimental study on arcing initiation mechanism based on electric current and optical emission measurement in a capacitively coupled plasma*
8:15 AM–8:30 AM
Presenter:
SiJun Kim
(Chungnam Natl Univ)
Authors:
SiJun Kim
(Chungnam Natl Univ)
Chulhee Cho
(Chungnam Natl Univ)
Minsu Choi
(Chungnam Natl Univ)
Youngseok Lee
(Chungnam Natl Univ)
Inho Seong
(Chungnam Natl Univ)
Wonnyoung Jeong
(Chungnam Natl Univ)
Byeongyeop Choi
(Chungnam Natl Univ)
Youbin Seol
(Chungnam Natl Univ)
Sanghoo Park
(Korea Advanced Institute of Science and Technology (KAIST))
Daewoong Kim
(Korea Institute of Machinery and Materials (KIMM))
Shinjae You
(Chungnam Natl Univ)
Collaborations:
KAIST, KIMM
*This research was supported by a National Research Council of Science & Technology (NST) grant funded by the Korean government (MSIP) (CRF-20-01-NFRI), by the Next-Generation Intelligence Semiconductor R&D Program through the Korea Evaluation Institute of Industrial Technology (KEIT) funded by the Korean government (MOTIE), by the Korea Institute of Energy Technology Evaluation and Planning (KETEP) and the MOTIE of the Republic of Korea (20202010100020), by the MOTIE (1415179040, 1415179069, 1415181071, 1415180221) and KSRC (Korea Semiconductor Research Consortium) (20009818, 20010420, 20019500, 20019473), by a Korea Institute for Advancement of Technology (KIAT) grant funded by the Korean Government (MOTIE) (P0008458, HRD Program for Industrial Innovation), by the Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Education (NRF-2020R1A6A1A03047771), by the KIMM Institutional Program (NK236F) and NST/KIMM, and by "Regional Innovation Strategy (RIS)" through the National Research Foundation of Korea(NRF) funded by the Ministry of Education(MOE)(2021RIS-004).
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