Bulletin of the American Physical Society
76th Annual Gaseous Electronics Conference
Volume 68, Number 9
Monday–Friday, October 9–13, 2023; Michigan League, Ann Arbor, Michigan
Session GF2: Basic Plasma Phenomena II
10:00 AM–12:00 PM,
Friday, October 13, 2023
Room: Michigan League, Henderson
Chair: Louis Jose, University of Michigan
Abstract: GF2.00007 : New micro-plasma reactors for the synthesis of heterostructures of 2D films of hexagonal boron nitride and graphene*
11:45 AM–12:00 PM
Presenter:
Joao Santos Sousa
(LPGP, CNRS & Univ. Paris-Saclay)
Authors:
Abd-Almalik Halfaoui
(LPGP, CNRS & Univ. Paris-Saclay)
Gérard Bauville
(LPGP, CNRS & Univ. Paris-Saclay)
Pascal Jeanney
(LPGP, CNRS & Univ. Paris-Saclay)
Stéphane Pasquiers
(LPGP, CNRS & Univ. Paris-Saclay)
Joao Santos Sousa
(LPGP, CNRS & Univ. Paris-Saclay)
A detailed electro-optical characterization of the different micro-plasma devices used has been performed, for several operating conditions, from pure argon to argon-nitrogen mixtures, from few tens to several hundreds of mbars of pressure, from DC to high-frequency (tens of kHz) nano-second pulsed electrical schemes. The complementarity of electric measurements and fast ICCD imaging, from a transverse and longitudinal perspective, along with edge-detection algorithms, allowed to highlight the characteristics of the development of the cathodic expansion as a function of the current deposited in the plasma. The main implications of our experimental results are the fact the plasma is not, as stated in the literature, confined in the hole in the abnormal regime, reaching further out of the hole on the cathode side, depending on the pressure and gas species. In the normal regime, the cathodic expansion spreads at lower currents the further it is from the electrode. When the plasma can no longer extend, limited by the electrode surface, it is forced to undergo through a second abnormal regime, now extending itself in volume.
*Work supported by the French ANR project PlasBoNG (ANR-20-CE09-0003-01).
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