Bulletin of the American Physical Society
76th Annual Gaseous Electronics Conference
Volume 68, Number 9
Monday–Friday, October 9–13, 2023; Michigan League, Ann Arbor, Michigan
Session GF2: Basic Plasma Phenomena II
10:00 AM–12:00 PM,
Friday, October 13, 2023
Room: Michigan League, Henderson
Chair: Louis Jose, University of Michigan
Abstract: GF2.00004 : Vibrationally Excited Fluxes to Wafers in Plasma Processing*
11:00 AM–11:15 AM
Presenter:
Evan Litch
(University of Michigan)
Authors:
Evan Litch
(University of Michigan)
Hyunjae Lee
(Samsung Electronics Co.)
Sang Ki Nam
(Samsung Electronics Co. Ltd.)
Mark Kushner
(University of Michigan)
*Work was supported by Samsung Electronics Co. and the US National Science Foundation (2009219).
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