Bulletin of the American Physical Society
76th Annual Gaseous Electronics Conference
Monday–Friday, October 9–13, 2023; Michigan League, Ann Arbor, Michigan
Session FT3: Plasma Deposition & Damage
1:30 PM–3:30 PM,
Tuesday, October 10, 2023
Room: Michigan League, Koessler
Chair: Kallol Bera, Applied Materials
Abstract: FT3.00006 : A Study on the Hydrogen Plasma induced material damage for EUV lithography Components and Material evaluation*
3:15 PM–3:30 PM
Presenter:
Eunseok Choe
(Korea Research Institute of Standards and Science)
Authors:
Eunseok Choe
(Korea Research Institute of Standards and Science)
Seungwook Choi
(UST (University of Science and Technology))
Ansoon Kim
(UST (University of Science and Technology))
Kwan-Yong Kim
(Korea Research Institute of Standards and Science)
H. J. Yeom
(Korea Research Institute of Standards and Science)
Min Young Yoon
(Korea Research Institute of Standards and science)
Seongwan Hong
(Korea Research Institute of Standards and Science)
Dong-Wook Kim
(Chungnam National University)
Jung Hyung Kim
(Korea Research Institute of Standards and Science)
Hyo-Chang Lee
(Korea Aerospace University)
"Cambria Math",serif;mso-bidi-font-family:"Times New Roman";color:windowtext'> m:val="roman"/>× 108 to 3.5<!--[if gte msEquation 12]> style='font-size:11.0pt;mso-bidi-font-size:10.0pt;line-height:160%;font-family:
"Cambria Math",serif;mso-bidi-font-family:"Times New Roman";color:windowtext'> m:val="roman"/>× 1010 cm-3, the electron temperature was 1 to 4 eV, and the ion energy was several to tens of eV, which has similar environment of the EUV-induced hydrogen plasma. The damage of the Mo2C, one of the possible candidate for EUV-pellicle material, samples was quantitatively analyzed by measuring the pore area fraction and chemical characteristics after plasma exposure under various H2 plasma conditions such as electron density, gas pressure, and exposure time.
*This research was supported by the Material Innovation Program (Grant No. 2020M3H4A3106004) of the National Research Foundation of Korea (NRF) funded by the Ministry of Science and ICT, the R&D Convergence Program (Grant No. PG1711-5, CRC-20–01-NFRI) of the National Research Council of Science and Technology (NST) of the Republic of Korea, and the Korea Research Institute of Standards and Science (Grant No. KRISS GP2022-0011-04, GP2022-0011-05) and the Korea Research Institute of Standards and Science (Grant No. KRISS GP2020–0009-03).
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