Bulletin of the American Physical Society
76th Annual Gaseous Electronics Conference
Volume 68, Number 9
Monday–Friday, October 9–13, 2023; Michigan League, Ann Arbor, Michigan
Session FT1: Plasma Etching I
8:00 AM–9:30 AM,
Tuesday, October 10, 2023
Room: Michigan League, Koessler
Chair: Shahid Rauf, Applied Materials, Inc.
Abstract: FT1.00001 : Dynamics of Plasma Atomic Layer Etching: Molecular Dynamics Simulations and Optical Emission Spectroscopy*
8:00 AM–8:15 AM
Presenter:
David B Graves
(Princeton University)
Authors:
David B Graves
(Princeton University)
Joseph R Vella
(Princeton Plasma Physics Laboratory)
Quinzen Hao
(University of Houston)
Vincent Donnelly
(University of Houston)
*This work was partially supported in part by the US Department of Energy OFES,contract # DE-AC02-09CH11466.
Follow Us |
Engage
Become an APS Member |
My APS
Renew Membership |
Information for |
About APSThe American Physical Society (APS) is a non-profit membership organization working to advance the knowledge of physics. |
© 2024 American Physical Society
| All rights reserved | Terms of Use
| Contact Us
Headquarters
1 Physics Ellipse, College Park, MD 20740-3844
(301) 209-3200
Editorial Office
100 Motor Pkwy, Suite 110, Hauppauge, NY 11788
(631) 591-4000
Office of Public Affairs
529 14th St NW, Suite 1050, Washington, D.C. 20045-2001
(202) 662-8700