Bulletin of the American Physical Society
76th Annual Gaseous Electronics Conference
Volume 68, Number 9
Monday–Friday, October 9–13, 2023; Michigan League, Ann Arbor, Michigan
Session FR2: Plasma Chemistry and Dust-Particle-Containing Plasmas
10:00 AM–11:45 AM,
Thursday, October 12, 2023
Room: Michigan League, Koessler
Chair: David Graves, Princeton University
Abstract: FR2.00002 : Evidence of Gas Phase Nucleation of Nano Crystalline Diamond Through the Analysis of Activation Energy
10:15 AM–10:30 AM
Presenter:
Tanvi Nikhar
(Michigan State University)
Authors:
Tanvi Nikhar
(Michigan State University)
Shengyuan Bai
(Michigan State University)
Sergey V Baryshev
(Michigan State University)
To investigate this, we modified the substrate preparation and sample collection method while keeping the growth parameters constant: un-seeded Si substrates were physically separated from the plasma by a metal stub with a pinhole through which sample was collected. Electron microscopy and Raman spectroscopy of the collected sample found that NCD self nucleates in the plasma and flows to the substrate which acts as a mere collection plate meaning that the location of formation of NCD is in the gas phase. This warrants a revisit to the calculation of Ea where we propose to substitute substrate temperature with gas temperature (∼2000K) that we obtained by simulating a basic model of H2/CH4 plasma for our reactor geometry. The new calculations give values in the range of SCD formation suggesting that the formation processes for NCD and SCD could be the same.
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