Bulletin of the American Physical Society
76th Annual Gaseous Electronics Conference
Volume 68, Number 9
Monday–Friday, October 9–13, 2023; Michigan League, Ann Arbor, Michigan
Session ET3: Sheaths and Plasma Boundary Interactions
1:30 PM–3:15 PM,
Tuesday, October 10, 2023
Room: Michigan League, Vandenberg
Chair: Lucas Beving, Sandia National Labs (NM)
Abstract: ET3.00003 : A semi-analytical RF sheath model for a wide range of excitation waveforms and amplitudes, and levels of collisionality
2:00 PM–2:15 PM
Presenter:
Tagra Samir
(Ruhr-Universität Bochum)
Authors:
Tagra Samir
(Ruhr-Universität Bochum)
Sebastian Wilczek
(Ruhr-Universität Bochum)
Maximilian Klich
(Ruhr-Universität Bochum)
Thomas Mussenbrock
(Ruhr-Universität Bochum)
Ralf Peter Brinkmann
(Ruhr-Universität Bochum)
The sheath is also an important factor in determining the level of plasma heating, which can have a significant impact on the overall plasma behavior, including the plasma density, ion energy distribution, and the formation of reactive species. Therefore, developing accurate models of the sheath is of both theoretical and practical interest for understanding and controlling the behavior of RF-CCPs in various applications.
This contribution will present a semi-analytical RF sheath model for a wide range of excitation waveforms and amplitudes, and levels of collisionality. It is based on the smooth step model (SSM), a recently developed approximate solution of the Poisson-Boltzmann equation which overcomes the limitations of the Godyak hard step model.
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