Bulletin of the American Physical Society
76th Annual Gaseous Electronics Conference
Volume 68, Number 9
Monday–Friday, October 9–13, 2023; Michigan League, Ann Arbor, Michigan
Session EF1: Modeling & Simulation VI: Moderate-High Pressure Plasma Sources
8:00 AM–9:30 AM,
Friday, October 13, 2023
Room: Michigan League, Vandenberg
Chair: Amanda M. Lietz, North Carolina State University
Abstract: EF1.00005 : Plasma chemistry modelling of SF6 replacement gas for high voltage switches*
9:00 AM–9:15 AM
Presenter:
Andres Castillo
(Stanford University)
Authors:
Andres Castillo
(Stanford University)
Matthew M Hopkins
(Sandia National Laboratories)
Amanda M. Lietz
(North Carolina State University)
Kentaro Hara
(Stanford University)
SNL is managed and operated by NTESS under DOE NNSA contract DE‐NA0003525. We thank the support by the Office of Naval Research under grant no. N00014-21-1-2698.
[1] Zhang et al 2020 J. Phys. D: Appl. Phys. 53 173001
[2] Li et al 2020 ACS Omega 5 5911–5920
[3] Lietz et al 2022 Spectrochimica Acta Part B: Atomic Spectroscopy 197 106543
[4] Fu et al 2020 J. Phys. D: Appl. Phys. 53 105202
*SNL is managed and operated by NTESS under DOE NNSA contract DE‐NA0003525. We thank the support by the Office of Naval Research under grant no. N00014-21-1-2698.
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