Bulletin of the American Physical Society
76th Annual Gaseous Electronics Conference
Volume 68, Number 9
Monday–Friday, October 9–13, 2023; Michigan League, Ann Arbor, Michigan
Session DT1: Modeling & Simulation I: Kinetic Modeling
8:00 AM–9:15 AM,
Tuesday, October 10, 2023
Room: Michigan League, Hussey
Chair: Alexandre Likhanskii, Applied Materials
Abstract: DT1.00004 : Particle-in-Cell simulations of high voltage-driven low pressure capacitively coupled plasmas*
9:00 AM–9:15 AM
Presenter:
De-Qi Wen
(University of California, Berkeley)
Authors:
De-Qi Wen
(University of California, Berkeley)
Janez Krek
(Michigan State University)
Jon T Gudmundsson
(University of Iceland)
Emi Kawamura
(University of California, Berkeley)
Michael A Lieberman
(University of California, Berkeley)
Peng Zhang
(Michigan State University)
John P Verboncoeur
(Michigan State University)
*This work was supported by the Air Force Office of Scientific Research (AFOSR) MURI Grant FA9550-21-1-0367 and NSF-DOE Partnership Grant for DE-SC0022078. the Icelandic Research Fund Grant Nos.163086 and 217999, and a gift from the Applied Materials Corporation, AKT Display Division.
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