Bulletin of the American Physical Society
76th Annual Gaseous Electronics Conference
Volume 68, Number 9
Monday–Friday, October 9–13, 2023; Michigan League, Ann Arbor, Michigan
Session DF2: Moderate Pressure Capacitively Coupled Plasmas
10:00 AM–12:00 PM,
Friday, October 13, 2023
Room: Michigan League, Hussey
Chair: Julian Schulze, Ruhr University Bochum, Germany
Abstract: DF2.00003 : Tuning of Radio-Frequency (RF) Plasmas by a Perpendicular Magnetic Field
10:30 AM–10:45 AM
Presenter:
Samsud Moon
(University of Toledo)
Authors:
Samsud Moon
(University of Toledo)
Abbas Semnani
(University of Toledo)
This study investigates RF plasma under the influence of a magnetic field generated by a permanent magnet positioned at a specific location along the electrode gap. The pressure within the system is varied within the range of tens to hundreds of millitorr, and the impact of plasma excitation frequency on properties such as plasma conductivity, permittivity, reflection, and transmission is examined—the probing frequencies used in the study span from 100s of MHz. The primary objective of this research is to minimize plasma loss by reducing plasma conductivity while maintaining the necessary negative permittivity. To pursue this objective, the results are compared across three scenarios: no plasma, plasma operating without a magnetic field, and plasma subjected to a perpendicular magnetic field.
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