Bulletin of the American Physical Society
76th Annual Gaseous Electronics Conference
Volume 68, Number 9
Monday–Friday, October 9–13, 2023; Michigan League, Ann Arbor, Michigan
Session DF2: Moderate Pressure Capacitively Coupled Plasmas
10:00 AM–12:00 PM,
Friday, October 13, 2023
Room: Michigan League, Hussey
Chair: Julian Schulze, Ruhr University Bochum, Germany
Abstract: DF2.00001 : Hybrid Plasma Simulation of Capacitively-Coupled O2 Plasma at Moderate Pressure
10:00 AM–10:15 AM
Presenter:
Nakul Nuwal
(University of Texas at Dallas)
Authors:
Nakul Nuwal
(University of Texas at Dallas)
Kallol Bera
(Applied Materials)
Abhishek Verma
(Applied Materials)
Rupali Sahu
(Applied Materials)
Shahid Rauf
(Applied Materials)
Shadhin Hussain
(University of Texas at Dallas)
Matthew Goeckner
(University of Texas at Dallas)
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