Bulletin of the American Physical Society
76th Annual Gaseous Electronics Conference
Volume 68, Number 9
Monday–Friday, October 9–13, 2023; Michigan League, Ann Arbor, Michigan
Session DF1: Diagnostics III
8:00 AM–9:15 AM,
Friday, October 13, 2023
Room: Michigan League, Hussey
Chair: Katharina Stapelmann, North Carolina State University
Abstract: DF1.00003 : Development of a flat-cutoff sensor for non-invasive plasma density measurement in plasma processing*
8:45 AM–9:00 AM
Presenter:
HeeJung Yeom
(Korea Research Institute of Standards and Science)
Authors:
HeeJung Yeom
(Korea Research Institute of Standards and Science)
Min Young Yoon
(Korea Research Institute of Standards and science)
Eun-Seok Choe
(Korea Research Institute of Standards and Science)
Dae Jin Seong
(Korea Research Institute of Standards and Science)
Gwang-Seok Choi
(Korea Research Institute of Standards and Science)
Shin Jae You
(Department of Physics, Chungnam National University)
Jung Hyung Kim
(Korea Research Institute of Standards and Science)
Hyo-Chang Lee
(Korea Aerospace University)
*This research was supported by the Material Innovation Program (Grant No. 2020M3H4A3106004) of the National Research Foundation (NRF) of Korea, and funded by (i) the Ministry of Science and ICT and the R&D Convergence Program (Grant No. CRC-20-01-NFRI) of the National Research Council of Science and Technology (NST) of the Republic of Korea, (ii) the Korea Evaluation Institute of Industrial Technology (Grant No. 1415181740), and (iii) the Korea Research Institute of Standards and Science (Grant Nos. KRISS GP2023-0012-08 and GP2023-0012-09).
Follow Us |
Engage
Become an APS Member |
My APS
Renew Membership |
Information for |
About APSThe American Physical Society (APS) is a non-profit membership organization working to advance the knowledge of physics. |
© 2024 American Physical Society
| All rights reserved | Terms of Use
| Contact Us
Headquarters
1 Physics Ellipse, College Park, MD 20740-3844
(301) 209-3200
Editorial Office
100 Motor Pkwy, Suite 110, Hauppauge, NY 11788
(631) 591-4000
Office of Public Affairs
529 14th St NW, Suite 1050, Washington, D.C. 20045-2001
(202) 662-8700