Bulletin of the American Physical Society
75th Annual Gaseous Electronics Conference
Volume 67, Number 9
Monday–Friday, October 3–7, 2022;
Sendai International Center, Sendai, Japan
The session times in this program are intended for Japan Standard Time zone in Tokyo, Japan (GMT+9)
Session FF1: Inductively Coupled Plasmas |
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Chair: Mate Vass, Ruhr University Bochum, Germany Room: Sendai International Center Shirakashi 1 |
Friday, October 7, 2022 8:00AM - 8:15AM |
FF1.00001: Formation of atomic hydrogen and negative ions in low-pressure inductively coupled hydrogen plasmas: two-dimensional simulations incorporating vibrational kinetics and gas heating James Dedrick, Gregory J Smith, Paola Diomede, Andrew R Gibson, Scott J Doyle, Vasco Guerra, Mark J Kushner, Timo Gans Low-pressure hydrogen plasmas are of interest for the study of basic plasma physics and applications including materials surface processing and negative-ion sources. For relatively high power densities, which are often present in inductively coupled plasmas, spatial gradients in the neutral gas temperature can develop in the bulk plasma that influence the vibrational kinetics. In this study we undertake two dimensional fluid-kinetic simulations of planar inductively coupled hydrogen plasmas, and investigate the response of atomic hydrogen and negative ions to the inclusion of self-consistent heating of neutrals and gas-temperature dependent reaction rates. The results show that the implementation of an isothermal background gas at 325 K can result in a factor 3 increase in the maximum density of atomic hydrogen, and a significant change to the spatial distribution of vibrational states, compared to when the gas temperature is self-consistently determined. |
Friday, October 7, 2022 8:15AM - 8:30AM Author not Attending |
FF1.00002: Spatial electromagnetic diagnostics of overshoot phenomenon in pulsed inductively coupled Ar plasmas Xiangyun Lv, Kai Zhao, Quan-Zhi Zhang, Fei Gao, You-Nian Wang We report on an experimental investigation of the RF electromagnetic field in pulsed inductively coupled Ar plasma. To focus on the correlation between the plasma characteristic and the RF electromagnetic field, a movable Langmuir probe and magnetic probe were used to determine the spatio-temporal evolutions of the electron density, the electron energy probability distribution function and the magnetic field. At relatively low pressure, the amplitude of the magnetic field exhibits a strong peak in the initial pulse stage, due to a relatively low density of residual electron from the previous afterglow. Consequently, it generates a large number of high energy electrons, resulting in a high ionization rate and, thus, a remarkable overshoot in the electron density occurs at the initial active glow. In contrast, at relatively high pressure, the penetration depth of RF electromagnetic field decreases due to a higher density of the residual electron from the previous afterglow, so the peak of the RF electromagnetic field is reduced. Therefore, the induced electric field is weak, and there are fewer high energy electrons. As a result, no overshoot phenomenon is observed. Moreover, with the increase of radial and axial distance, the penetration depth of RF magnetic field reduces, which decreases the induced electric field and ionization rate. |
Friday, October 7, 2022 8:30AM - 8:45AM |
FF1.00003: Hardware design and process optimization of industrial ICP N2 reactor using Two and Three Dimensional CFD models Meihua Zhang, Abhra Roy, Ryong Hwang, Jeonghee Jo, Amir Kiaee, David Solomon, Yun Yang The current report presents a systematic study on the hardware design and process optimization of industrial ICP reactor using comprehensive CFD modeling. As a first step, the 2D axisymmetric model is developed to simulate nitrogen discharge in Eugenus's ICP reactor. RF system is composed of RF generator, matching network, current ratio splitting system, and ICP plasma discharging antenna. Antenna design consists of inner and outer coil antennas which inductively shape magnetic field and corresponding E-field at target locations. It was observed that impedance of both antennas was relatively near series resonance location which is low resistance/maximum current state. Commercial modeling software, CFD-ACE+ was used for simulations of inductively coupled plasma reactor (without wafer bias) to address gas flow, heat transfer, plasma chemistry and electromagnetics in a coupled fashion. The parametric investigations have been performed with different coil current ratio, chamber pressure and mass flow rate to optimize the process. The plasma uniformity at 1mm above wafer was calculated for all the cases and results show that when current ratio and mass flow rate are fixed, higher processing pressure will obtain better uniformity. In addition, mass flow rate has little influence on the plasma uniformity. In a reasonable range, higher current in the outer trirosa antenna and lower current in durosa antenna can help achieve better plasma uniformity. A full three dimensional model also has been developed, and further studies are being performed including different coil current ratio. For three dimensional model, a 49-point uniformity calculation method is used and same trend was found compared with two dimensional simulation. The numerical results have been presented with plasma and species densities, electromagnetic field, ion flux to the substrate, and ion energy and angular distributions. Limited experiments are performed and presented to validate the CFD model. |
Friday, October 7, 2022 8:45AM - 9:00AM |
FF1.00004: An introduction to the role of chemical models in the enthalpy rebuilding procedure of Inductively Coupled Plasma facilities Enrico Anfuso, Andrea Fagnani, Olivier Chazot Plasma wind tunnels are essential in recreating the same aerothermodynamic conditions experienced during an atmospheric entry. For instance, they are central to correctly designing thermal protection systems of spacecraft. Testing conditions (e.g., free-stream enthalpy) must be accurately known to replicate a flight scenario but unfortunately, they cannot be directly measured and must rely on rebuilding procedures. These methodologies couple numerical models and experimental data increasing the total uncertainty of the envisaged quantities due to inaccuracies in the selected models and errors in the measurement chain. |
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