Bulletin of the American Physical Society
73rd Annual Gaseous Electronics Virtual Conference
Volume 65, Number 10
Monday–Friday, October 5–9, 2020; Time Zone: Central Daylight Time, USA.
Session YF4: Plasma Deposition I
1:00 PM–2:15 PM,
Friday, October 9, 2020
Chair: Costel Biloiu, Applied Materials Inc.
Abstract: YF4.00004 : Penetration of hydrogen atoms and termination of dangling bonds in amorphous carbon films
2:00 PM–2:15 PM
Preview Abstract Abstract
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