Bulletin of the American Physical Society
73rd Annual Gaseous Electronics Virtual Conference
Volume 65, Number 10
Monday–Friday, October 5–9, 2020; Time Zone: Central Daylight Time, USA.
Session UR1: Glows: DC, Pulsed, Microwave, Others
1:00 PM–2:45 PM,
Thursday, October 8, 2020
Chair: Ihor Korolov, Ruhr-University Bochum, Germany
Abstract: UR1.00006 : Ion implantation technology architecture and modelling challenges
2:15 PM–2:45 PM
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(Applied Materials Inc)
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