Bulletin of the American Physical Society
73rd Annual Gaseous Electronics Virtual Conference
Volume 65, Number 10
Monday–Friday, October 5–9, 2020; Time Zone: Central Daylight Time, USA.
Session PW2: Capacitively Coupled Plasmas II
1:00 PM–2:30 PM,
Wednesday, October 7, 2020
Chair: Xiaopu Li, Applied Materials
Abstract: PW2.00002 : Kinetic Modeling of Low-Pressure Multi-Frequency Capacitively Coupled Plasmas
1:30 PM–2:00 PM
Preview Abstract Abstract
(Applied Materials Inc)
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