Bulletin of the American Physical Society
73rd Annual Gaseous Electronics Virtual Conference
Volume 65, Number 10
Monday–Friday, October 5–9, 2020; Time Zone: Central Daylight Time, USA.
Session FT2: Modeling and Simulation: Plasma Sources
8:00 AM–9:45 AM,
Tuesday, October 6, 2020
Chair: Alex Likhanskii, Applied Materials
Abstract: FT2.00007 : Particle-in-cell simulation of dual frequency capacitively coupled plasma with pulsed DC biasing at low pressure
9:30 AM–9:45 AM
Preview Abstract Abstract
The American Physical Society (APS) is a non-profit membership organization working to advance the knowledge of physics.
1 Physics Ellipse, College Park, MD 20740-3844
Editorial Office 1 Research Road, Ridge, NY 11961-2701 (631) 591-4000
Office of Public Affairs 529 14th St NW, Suite 1050, Washington, D.C. 20045-2001 (202) 662-8700