Bulletin of the American Physical Society
73rd Annual Gaseous Electronics Virtual Conference
Volume 65, Number 10
Monday–Friday, October 5–9, 2020; Time Zone: Central Daylight Time, USA.
Session DM2: Workshop IV: Plasma Enhanced Atomic Layer Etch/Atomic Layer Deposition
12:45 PM–4:30 PM,
Monday, October 5, 2020
Chair: Sebastian Engelmann, IBM Research
Abstract: DM2.00005 : Selective Etching Promoted by the Area Selective Growth of Deactivating Polymers.
3:15 PM–4:00 PM
Preview Abstract Abstract
(IBM Research | Almaden)
The American Physical Society (APS) is a non-profit membership organization working to advance the knowledge of physics.
1 Physics Ellipse, College Park, MD 20740-3844
Editorial Office 1 Research Road, Ridge, NY 11961-2701 (631) 591-4000
Office of Public Affairs 529 14th St NW, Suite 1050, Washington, D.C. 20045-2001 (202) 662-8700