Bulletin of the American Physical Society
73rd Annual Gaseous Electronics Virtual Conference
Volume 65, Number 10
Monday–Friday, October 5–9, 2020; Time Zone: Central Daylight Time, USA.
Session DM2: Workshop IV: Plasma Enhanced Atomic Layer Etch/Atomic Layer Deposition
12:45 PM–4:30 PM,
Monday, October 5, 2020
Chair: Sebastian Engelmann, IBM Research
Abstract: DM2.00003 : Atomic Layer Etching of Metals with Anisotropy, Specificity and Selectivity
1:45 PM–2:30 PM
Preview Abstract Abstract
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