Zero-dimensional simulation of He and He/O$_{2}$ microscale atmospheric pressure plasma jet: Role of the vibrationally excited O$_{2}$*

Reactive oxygen species at high concentrations produced in microscale atmospheric pressure plasma jet remains at room temperature, which is particularly suitable for biomedical applications. The chemical kinetics of such species is analyzed by a developed zero-dimensional(volume-averaged) global model based on particle and electron energy balance equations. The simulation results are benchmarked against the available measurement data of He and He/O$_{2}$ plasma. The wall recombination of O plays an important role in O and O$_{3}$ concentration. The most dominant reaction for O$_{3}$ production is the three-body reaction of He, O, and O$_{2}$. The vibrational kinetics of O$_{2}$ has a negligible influence on O density, electron density, and electron temperature.