Bulletin of the American Physical Society
72nd Annual Gaseous Electronics Conference
Volume 64, Number 10
Monday–Friday, October 28–November 1 2019; College Station, Texas
Session NR3: Perspectives on Plasma Science |
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Chair: David Staack, Texas A&M University Room: Century III |
Thursday, October 31, 2019 8:00AM - 8:30AM |
NR3.00001: Overview of linear plasma sources as applied to ribbon ion and plasma beam processing of scanned substrates Invited Speaker: Peter Kurunczi Ribbon beams of ions and plasmas offer unique capabilities within scanned substrate processing techniques such as ion implantation, physical and chemical surface modification, etching and deposition. This talk will cover an overview of ribbon beam technology used across a range of applications, with examples from processing of silicon, glass, and flexible plastic substrates used within semiconductor, display and roll to roll web industries. Various types of linear plasma sources and methods of ion beam generation will be discussed. Of note are the very different types of plasma ion sources used, from magnetized dc discharges driven by thermionic cathodes to rf generated plasmas. The audience is encouraged to extrapolate to how ribbon beams can be used for their specific material processing needs. [Preview Abstract] |
Thursday, October 31, 2019 8:30AM - 9:00AM |
NR3.00002: Low-temperature plasma science and collision physics studies at the National Science Foundation Invited Speaker: Vyacheslav (Slava) Lukin Low-temperature plasma science and collision physics studies at the National Science Foundation [Preview Abstract] |
Thursday, October 31, 2019 9:00AM - 9:30AM |
NR3.00003: Overview of DOE/FES Program Activities for Low Temperature Plasma Science Research Invited Speaker: Nirmol Podder Overview of DOE/FES Program Activities for Low Temperature Plasma Science Research [Preview Abstract] |
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