Frequency variation in micro atmospheric pressure plasma jets driven by tailored voltage waveforms*

Radio frequency driven micro atmospheric pressure plasma jets ($\mu $-APPJs) are often used as efficient sources of reactive species at low temperatures for, e.g. biomedical applications and surface modifications. In the present work, we perform a systematic investigation of the electron heating dynamics and the generation of selected species in \textmu -APPJs driven by Voltage Waveform Tailoring (VWT) as a function of the fundamental frequency, the number of consecutive harmonics, the reactive gas admixtures (He/N$_{\mathrm{2}})$ and the peak-to-peak voltage amplitude based on experiments and kinetic particle-in-cell/Monte Carlo collision simulations. Our results demonstrate the potential of VWT to optimize and control the generation of selected reactive particle species.