Bulletin of the American Physical Society
72nd Annual Gaseous Electronics Conference
Volume 64, Number 10
Monday–Friday, October 28–November 1 2019; College Station, Texas
Session MW1: Poster Session II
4:00 PM,
Wednesday, October 30, 2019
Room: Kyle Field HOC
Abstract: MW1.00024 : Multi-physics simulation of a capacitively coupled plasma reactor with a non-flat electrode
Preview Abstract
Abstract
Authors:
Seung-Min Ryu
(The university of texas at austin)
Dylan Pederson
(The university of texas at austin)
Yunho Kim
(The university of texas at austin)
Kenta Suzuki
(Esgee Technologies Inc)
Laxminarayan Raja
(The university of texas at austin)
Namki Cho
(Samsung electronics)
Jinseok Lee
(Samsung electronics)
Chungho Cho
(Samsung electronics)
Jiho Uh
(Samsung electronics)
Sang-Jin Choi
(Samsung electronics)
Collaborations:
Samsung electronics, Esgee Technologies Inc, The University of Texas at Austin
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