A spectral-kinetic approach for the planar multipole resonance probe*

The planar multipole resonance probe (pMRP) is a diagnostic-tool based on the concept of active plasma resonance spectroscopy (APRS), which excites the plasma in the GHz range and records the response to detect resonances. Due to its planar design the pMRP is especially suited to monitor plasma processes without perturbing them. To determine plasma parameter from measured resonance, a model for the relation between plasma and resonance parameter is required. By means of the cold plasma model a relation between electron density and the resonance frequency can be derived. Another important plasma parameter is the electron temperature, which has to be determined by a different resonance parameter, namely the half-width of the resonance peak. However, a measured resonance peak in a low pressure plasma is broadened by kinetic effects, which requires a kinetic model to derive a correct relation between the half-width and the electron temperature. In this work a spectral kinetic approach - a particle simulation where the fields are calculated in the Fourier space - for the pMRP will be presented to analyze the influence of kinetic effects on the half-width.