Bulletin of the American Physical Society
72nd Annual Gaseous Electronics Conference
Volume 64, Number 10
Monday–Friday, October 28–November 1 2019; College Station, Texas
Session MW1: Poster Session II
4:00 PM,
Wednesday, October 30, 2019
Room: Kyle Field HOC
Abstract: MW1.00012 : Emission model for determining EEDF in low-pressure oxygen plasmas*
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Abstract
Authors:
Jessica Pachicano
(University of Wisconsin - Madison)
John B. Boffard
(University of Wisconsin - Madison)
Colie Keane
(University of Wisconsin - Madison)
Nathaniel Ly
(University of Wisconsin - Madison)
Colin Swee
(University of Wisconsin - Madison)
Chun C. Lin
(University of Wisconsin - Madison)
Amy Wendt
(University of Wisconsin - Madison)
*Supported by NSF grants PHY-1617602 and PHY-1068670
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