Bulletin of the American Physical Society
72nd Annual Gaseous Electronics Conference
Volume 64, Number 10
Monday–Friday, October 28–November 1 2019; College Station, Texas
Session FT1: Poster Session I
4:00 PM,
Tuesday, October 29, 2019
Room: Kyle Field HOC
Abstract: FT1.00060 : Electron energy probability function measurement in a 2 MHz and 13.56 MHz dual frequency capacitive argon discharge.
Preview Abstract
Abstract
Authors:
Bum-Seok Kim
(Hanyang University)
Kyung-Hyun Kim
(Hanyang University)
Nae-il Lee
(Hanyang University)
Chin-Wook Chung
(Hanyang University)
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