Bulletin of the American Physical Society
72nd Annual Gaseous Electronics Conference
Volume 64, Number 10
Monday–Friday, October 28–November 1 2019; College Station, Texas
Session FT1: Poster Session I
4:00 PM,
Tuesday, October 29, 2019
Room: Kyle Field HOC
Abstract: FT1.00041 : Simulation Evolution of Ion Energy Distribution Uniformity in Low Pressure Plasma used in semiconductor processes
Preview Abstract
Abstract
Authors:
Yun yang
(Mattson Technology, Inc.)
Shawming Ma
(Mattson Technology, Inc.)
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