Thursday, November 8, 2018
2:00PM - 2:30PM
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QR1.00001: Electron heating in electronegative capacitively coupled discharge of complex chemistry
Invited Speaker:
Jon Tomas Gudmundsson
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Thursday, November 8, 2018
2:30PM - 2:45PM
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QR1.00002: Spatio-temporal analysis of the electron power absorption in electropositive capacitive RF plasmas based on moments of the Boltzmann equation
Julian Schulze, Zoltan Donko, Trevor Lafleur, Sebastian Wilczek, Ralf Peter Brinkmann
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Thursday, November 8, 2018
2:45PM - 3:00PM
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QR1.00003: Striations in dual-frequency capacitively coupled CF\textunderscore 4 plasmas
Yong-Xin Liu, Ihor Korolov, Edmund Schungel, Zoltan Donko, Julian Schulze, You-Nian Wang
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Thursday, November 8, 2018
3:00PM - 3:15PM
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QR1.00004: Self-excited plasma series resonance driven by Gaussian type pulses in capacitively coupled plasmas
Li Wang, De-Qi Wen, Yuan-Hong Song, You-Nian Wang
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Thursday, November 8, 2018
3:15PM - 3:30PM
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QR1.00005: Breakdown at chamber wall in ICP/CCP PECVD plasma caused by higher harmonics
Michael Klick
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Thursday, November 8, 2018
3:30PM - 3:45PM
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QR1.00006: Electrical Asymmetric Effect in Very High Frequency Capacitively Coupled Plasma Source using Electromagnetic Plasma Model
Xiaopu Li, Kallol Bera, Shahid Rauf, Ken Collins
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Thursday, November 8, 2018
3:45PM - 4:00PM
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QR1.00007: Electromagnetic PIC Simulations of VHF CCP discharges having cylindrical geometry
Denis Eremin, Frederick Schmidt
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Thursday, November 8, 2018
4:00PM - 4:15PM
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QR1.00008: A method for coupling lumped element circuits to plasma simulations
Frederik Schmidt, Tobias Gergs, Thomas Mussenbrock, Jan Trieschmann
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Thursday, November 8, 2018
4:15PM - 4:30PM
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QR1.00009: Analysis of the power dissipation in a lumped element model for capacitive discharges
Dennis Engel, Laura Kroll, Schabnam Naggary, Ralf Peter Brinkmann
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Thursday, November 8, 2018
4:30PM - 4:45PM
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QR1.00010: Investigation of the electron and the ion kinetics in a capacitively coupled Ar plasma of intermediate pressue regime
Jin Seok Kim, Ho Jun Kim, Hae June Lee
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Thursday, November 8, 2018
4:45PM - 5:00PM
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QR1.00011: Dynamics of Multiple Ion Species in Low Pressure Capacitively Coupled Argon-Xenon Discharges
Maximilian Klich, Sebastian Wilczek, Ralf Peter Brinkmann, Jesper Janssen, Thomas Mussenbrock, Jan Trieschmann
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