Modeling of a large experimental DBD reactor using Ar-HMDSO mixtures at atmospheric pressure

Hexamethyldisiloxane (HMDSO) is often used as monomer in dielectric barrier discharges (DBDs) for the deposition of %silicon-organic organosilicon films. Already small admixtures of a few ppm of this monomer to the noble carrier gas lead to drastic changes of the discharge characteristics due to Penning ionization processes. In the present contribution, the impact of HMDSO on the electrical discharge characteristics of a large reactor for performing DBD experiments at atmospheric-pressure is investigated by means of numerical modeling. A time-dependent, spatially one-dimensional fluid model has been used to analyze discharges in argon with monomer admixture in the range from 0 to 600\,ppm applying an a.c.\ voltage with an amplitude of 4\,kV and a frequency of 20\,kHz. First comparison with corresponding experimental data shows quite good agreement between measured and modeling data for the discharge current.